Spin Coater ERK-SS SC
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작성자이알케이 댓글 0건 조회 337회 작성일 23-02-02 14:08본문
제품 사진
Spin Coating System
(ERK-SS SC)
일정 Thickness로 Coating하기 위한 장치로 다양한
노즐 및 Dispense방식을 적용하여 최적의
Coating Process를 구현합니다.
+ 특징
+ Process
ERK-SS 300
+ Substrate : Max 300mm Wafer
+ Direct Drain & Exhaust Line
ERK-SS-CB
+ Substrate : Max 200mm round
+ Spin Coater, Hot Plate
System Specification
ITEM | ERK-SS 150 | ERK-SS 200 | ERK-SS 300 |
Substrate Size | Max 6” 100mm × 100mm | Max 8” 200mm ×200mm | Max 12” 200mm × 200mm |
Spin Motor | AC Servo Motor | ||
Rotation Speed | Max 5000rpm | Max 5000rpm | Max 3000rpm |
Spin Chuck | Aluminum / Acetal / Etc Changeable according to wafer size | ||
Bowl Size | 200mm | 250mm | 300mm |
Controller / Display | PC , 15” Monitor / PLC, 7” Touch Panel | ||
Program storage | 20 steps 20 recipe programming (PLC) | ||
Option | FFU, Filter Etc | ||
Semi Auto Bake System
Semi auto baking system
(with Hot Plate & Cool Plate)
+ Plate configuration
= Hot plate & Cool plate
+ Hot Plate
= Temp : Max 350℃
+ Cool Plate
= Temp : 15 ~ 35℃
= Circulator control
+ Pin Up/Down
+ Baking time control
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