Spin Coater ERK-SS-SD
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작성자이알케이 댓글 0건 조회 225회 작성일 23-02-02 14:04본문
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Spin Developer System
(ERK-SS-SD Series)
+ ERK-SS-SD는 Coating, Exposure 후 Pattern 현상을
위한 장치로 제품 공정 및 Substrate에 따라 다양한 노즐,
Spin chuck을 구성하여 최적의 Develop Process를 구현합니다.
+ 특징
+ Process
Wafer, Glass, Ceramic(MLC) …
ERK-SS –SD (Wafer)
+ Substrate : Max 12”
ERK-SS-SD (Ceramic)
+ Substrate : 300mm Ceramic
System Specification
ITEM | ERK-SS-SD (Wafer) | ERK-SS-SD (Ceramic) |
Substrate Size | Max 12” | Max 12” ( t = 6) |
Spin Motor | AC Servo Motor | |
Rotation Speed | Max 3000rpm | Max 2000rpm |
Spin Chuck | Aluminum / Acetal / PP / Etc | |
Bowl | SUS, PP, Teflon Etc | |
# of Dispense Arms | Max 3 dispense arms Up to 2 chemical lines, up to 2 final rinse lines | |
Dispense Nozzle Types | Puddle / Spray / Stream / High pressure (spot or spray) | |
Chemical Supply | N2 Pressure / Magnet pump | |
Controller / Display | PC & 15” Monitor / PLC & 7” Touch Panel | |
Option | FFU, Chemical temp control Etc | |
Spin Cleaning System
Spin Cleaning System
+ Substrate
= 8” ~ 12” Ceramic
+ Dispense Arms
= 2 Chemical Arm
= 3 Cleaning nozzle, 2 Rinse nozzle, N2 dry
+ Chuck, Bowl
= PP Chuck (Cylinder Up/Down)
= PP Blow
+ Chemical supply : Magnet pump
+ Chemical flow control
+ Chemical temp control
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