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Spin Coater ERK-SS-CSC

작성자이알케이 댓글 0건 조회 265회 작성일 23-02-02 14:05

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Spin Coating System

(ERK-SS-CSC)

+ ERK-SS-CSC Model은 Square or Rectangular Substrate Coating시

모서리부분의 Coating 불량을 개선하기 위한 Chuck, Cover

동시 회전형 Spin Coater임.

+ 특징

§ Stand Alone Type Spin Coater

§ Manual loading & Auto process

§ Chuck & Cover 동시 회전(with Substrate)

§ PR Dispense용 Arm

§ Digital Process Controller

§Time, Speed, Acceleration,

§ Spin Speed Repeatability : ± 1 rpm

§ Color Touch Screen

§ PR, Solvent Supply Module

+ Process

§ Spin Coating (Square Glass, Mask, Ceramic)

Coating Unit

+ Manual or Auto loading

+ Cover Open/Close 구조

+ Chuck + Glass + Cover 동시 회전

+ Chuck & Cover 일체형

= 내부 Glass, Wafer 탑재

+ Motor 구동 Dispense Arm(Swing type)

+ Auto chemical dispense method

System Specification

ITEM	ERK-SS-CSC300	ERK-SS-CSC800
Substrate Size	Max 12” Round 200mm ×200mm	370mm × 470mm
Spin Motor	AC Servo Motor
Rotation Speed	Max 3000rpm		Max 1500rpm
Spin Chuck & Cup	Out Cup + Inner Cup(Chuck Plate) SUS, PP, Aluminum
Cover	(PVC or Al6061) Cylinder Up/Down
Controller / Display	PC or PLC / 15” Monitor, 7” Touch Panel
Program storage	20 steps 20 recipe programming (PLC)
Dispense Arm (*1)	PR, Solvent Nozzle, Stepping Motor In/Out, Cylinder Up/Down
Chemical Supply	Chemical Bottle 내장 Tank + N2 Press
Option	FFU , Diaphragm Pump Dispense

Cover 동시 회전형 Spin Coater _ ERK-SS-CSC800

Spin coater (ERK-SS-CSC800)

+ Substrate Size

= 370mm * 470mm (Square glass)

+ Spin Motor

= Motor : AC Servo, Max 1500rpm

+ Cover

= Cylinder Open / Close

+ Chemical dispense

= Manual or Auto

+ Option

= Chemical dispense arm, FFU Etc

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