Spin Coater Spin Coater
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작성자이알케이 댓글 0건 조회 225회 작성일 23-01-26 16:01본문
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Spin Coating System
(ERK-SS-AD Series)
+ ERK-SS-AD는 Auto Dispense 기능을 갖춘 Spin Coating System으로
PR, EBR Dispense Arm이 Motor에 의해 구동되어 정확한 위치에 Chemical을
Dispense하기 위한 System임.
+ 특징
§ Table Type Spin Coater
§ Manual loading & Auto process
§ PR, EBR용 Dispense Arm
§ Back Side Rinse Dispense
§ Digital Process Controller
§Time, Speed, Acceleration,
§ Spin Speed Repeatability : ± 1 rpm
§ Color Touch Panel Operation
§ PR, Solvent Supply Module
+ Process
§ Spin Coating (with EBR, BSR)
Coating Unit
+ Manual loading
+ Chuck Up/Down구조
+ Jig Centering (다양한 Size 사용가능)
PR, EBR, BSR
+ Syringe type needle, Barrel
+ N₂ Press (Time Control)
+ Air Operate Valve
System Specification
|
ITEM |
ERK-SS-AD-150 |
ERK-SS-AD-200 |
ERK-SS-AD-300 |
|
Substrate Size |
Max 6” wafer 100mm × 100mm |
Max 8” wafer 150mm ×150mm |
Max 12” wafer 200mm × 200mm |
|
Spin Motor |
AC Servo Motor |
||
|
Rotation Speed |
Max 5000rpm |
Max 5000rpm |
Max 3000rpm |
|
Spin Chuck |
Aluminum / Acetal / Etc (up/down, cylinder) |
||
|
Bowl Size |
300mm |
350mm |
450mm |
|
Controller / Display |
PLC, 4” Touch Panel |
||
|
Program storage |
20 steps 20 recipe programming (PLC) |
||
|
Dispense Arm |
PR, EBR Nozzle, Stepping Motor In/Out, Cylinder Up/Down |
||
|
EBR,BSR |
Bottle 내장 Steel Tank + N₂ Press |
||
|
Option |
Chemical supply module |
||
Spin Coater (with PR Auto Dispense)
Spin coater (with PR Auto Dispense)
+ Coater
= Manual loading & auto dispense
= Motor : AC Servo Motor
= PLC, 4” Touch panel
= PR On/Off Valve, time control
+ Chemical supply module
= Tank : N₂ 가압 방식
= PR Bottle : 1 Liter bottle 내장
= N₂ Pressure control
= Clamp 체결 방식
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