Spin Coater ERK-SS-CSC
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작성자이알케이 댓글 0건 조회 160회 작성일 23-02-02 14:05본문
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Spin Coating System
(ERK-SS-CSC)
+ ERK-SS-CSC Model은 Square or Rectangular Substrate Coating시
모서리부분의 Coating 불량을 개선하기 위한 Chuck, Cover
동시 회전형 Spin Coater임.
+ 특징
+ Process
Coating Unit
+ Manual or Auto loading
+ Cover Open/Close 구조
+ Chuck + Glass + Cover 동시 회전
+ Chuck & Cover 일체형
= 내부 Glass, Wafer 탑재
+ Motor 구동 Dispense Arm(Swing type)
+ Auto chemical dispense method
System Specification
ITEM | ERK-SS-CSC300 | ERK-SS-CSC800 | |
Substrate Size | Max 12” Round 200mm ×200mm | 370mm × 470mm | |
Spin Motor | AC Servo Motor | ||
Rotation Speed | Max 3000rpm | Max 1500rpm | |
Spin Chuck & Cup | Out Cup + Inner Cup(Chuck Plate) SUS, PP, Aluminum | ||
Cover | (PVC or Al6061) Cylinder Up/Down | ||
Controller / Display | PC or PLC / 15” Monitor, 7” Touch Panel | ||
Program storage | 20 steps 20 recipe programming (PLC) | ||
Dispense Arm (*1) | PR, Solvent Nozzle, Stepping Motor In/Out, Cylinder Up/Down | ||
Chemical Supply | Chemical Bottle 내장 Tank + N2 Press | ||
Option | FFU , Diaphragm Pump Dispense | ||
Cover 동시 회전형 Spin Coater _ ERK-SS-CSC800
Spin coater (ERK-SS-CSC800)
+ Substrate Size
= 370mm * 470mm (Square glass)
+ Spin Motor
= Motor : AC Servo, Max 1500rpm
+ Cover
= Cylinder Open / Close
+ Chemical dispense
= Manual or Auto
+ Option
= Chemical dispense arm, FFU Etc
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