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Spin Coater ERK-SS-CSC

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작성자이알케이 댓글 0건 조회 169회 작성일 23-02-02 14:05

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Spin Coating System

(ERK-SS-CSC)

+  ERK-SS-CSC Model은 Square or Rectangular Substrate Coating시 

모서리부분의 Coating 불량을 개선하기 위한 Chuck, Cover 

동시 회전형 Spin Coater.

특징

§ Stand Alone Type Spin Coater
§ Manual loading & Auto process
§ Chuck & Cover 동시 회전(with Substrate)
§ PR Dispense용 Arm
§ Digital Process Controller
§Time, Speed, Acceleration,
§ Spin Speed Repeatability : ± 1 rpm
§ Color Touch Screen
§ PR, Solvent Supply Module

+ Process

§ Spin Coating (Square Glass, Mask, Ceramic)

 

730e4d24ffed567154c4f87b77150589_1674716143_6092.png

  Coating Unit

+ Manual or Auto loading

+ Cover Open/Close 구조

+ Chuck + Glass + Cover 동시 회전

+ Chuck  & Cover 일체형

   = 내부 Glass, Wafer 탑재

+ Motor 구동 Dispense Arm(Swing type)

+ Auto chemical dispense method


System Specification


ITEM

ERK-SS-CSC300

ERK-SS-CSC800

Substrate Size

Max 12” Round

200mm ×200mm

370mm × 470mm

Spin Motor

AC Servo Motor

Rotation Speed

Max 3000rpm

Max 1500rpm

Spin Chuck & Cup 

Out Cup + Inner Cup(Chuck Plate)

SUS, PP, Aluminum

Cover

(PVC or Al6061)      Cylinder Up/Down

Controller / Display

PC or PLC /  15” Monitor, 7” Touch Panel

Program storage

20 steps 20 recipe programming  (PLC)

Dispense Arm (*1)

PR, Solvent Nozzle, Stepping Motor In/Out, Cylinder Up/Down

Chemical Supply

Chemical Bottle 내장 Tank + N2 Press

Option

FFU , Diaphragm Pump Dispense



Cover 동시 회전형 Spin Coater _ ERK-SS-CSC800


730e4d24ffed567154c4f87b77150589_1674716203_203.png
 

Spin coater (ERK-SS-CSC800)

+ Substrate Size

   =  370mm * 470mm  (Square glass)

+ Spin Motor

   = Motor : AC Servo, Max 1500rpm

+ Cover

  = Cylinder Open /  Close

+ Chemical dispense

   = Manual or Auto

+ Option

     = Chemical dispense arm, FFU Etc

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