Spin Coater ERK-MS
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작성자이알케이 댓글 0건 조회 244회 작성일 23-02-02 14:07본문
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Spin Coating System
(ERK-MS Series)
+ 특징
+ Option
ERK-MS 300
+ Substrate : 300mm wafer
+ Al 6061 Chuck
Operation Panel
+ 4” Color touch screen
+ Recipe programmable
System Specification
ITEM | ERK-MS 100 | ERK-MS 150 | ERK-MS 200 | ERK-MS 300 |
Substrate Size | Max 4” wafer 100 × 100mm | Max 6” wafer 150 ×150mm | Max 8” wafer 200 × 200mm | Max 12” wafer 300 × 300mm |
Spin Motor | AC Servo Motor | |||
Rotation Speed | Max 5000rpm ± 1rpm | Max 3000rpm | ||
Spin Chuck | Aluminum / Acetal / Peek Etc | |||
Bowl Size | 230mm | 280mm | 300mm | 400mm |
Bowl Material | Stainless Steel | |||
Controller / Display | PLC / 4” color touch panel | |||
Recipe | 20 steps 40 recipe programming RPM / Time / Acc Setting | |||
Power | 1 Phase 220V 3A | |||
Option | Auto dispense module / Edge rinse or Back rinse dispense function Spin Speed : 7,000rpm / Chemical Drain Port | |||
EBR Dispense Module
Spin coating system
(with EBR dispense module)
+ Dispense control
= N₂ press + Manual Switch control
+ Chemical Tank
= Stainless steel tank
= 1 liter chemical bottle 내장
+ Suck back valve (Option)
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